Equipment

Metallization and Passivation Sputtering Tool (Al, TiWN, Al2O3)

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Description

Singulus, FTM - A system for rapid physical vapour deposition, by DC/RF Magnetron Sputtering. This cluster tool consists of a central dealer, a 200 mm-cassette load lock, a soft-etch module, a three-target linear module (AlSiCu, TiN, SiO2 or AlOx) with two DC and one RF sources, and a soft etch module.

Available for external use

Associated technology

Location

Cleanroom

Contact.

Ricardo Ferreira Contact with Ricardo Ferreira