Equipment

Broad Beam Ion Milling System with SIMS end point detection

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Description

Nordiko 7500 - A system for material removal by ion milling which includes a load lock for single wafer loading or for cassettes of 200mm wafers and a process chamber. It is an advanced automatic vacuum coating system designed for the deposition of dielectric and metallic films. The unique system provides excellent geometry within wafer non-uniformity of material deposition on substrates up to 200 mm.

Available for external use

Associated technology

Location

Cleanroom

Contact.

Ricardo Ferreira Contact with Ricardo Ferreira