Spectral Imaging Ellipsometry

Ellipsometer290914_web_equipment Ampliar


The nanofilm_ep3_se from Accurion GmbH is a specialized ellipsometer used for spatially resolved measurements of ellipsometry angles Δ and Ψ. Ellipsometry is well-established technique for the optical and geometrical characterization of nanosized thin film stacks. In September 2013, the system has been upgraded with some unique features, especially in terms of illumination. A laser assembly consisting of a supercontinuum fibre laser (450-1000nm) and a diode laser rack providing five laser wavelengths between 370 and 445nm obtains spectrally resolved ellipsometry measurements. Furthermore, hardware pre-configuration have been applied to extend functionality of the ellipsometer to perform measurements between 1000 and 1700nm. This device can perform Variable Angle Ellipsometry (VAE) through a motorized goniometer. A custom-made stage provides mounting of Silicon wafers with a diameter up to 200mm and additional liquid handling components allow for the detection of surface plasmon resonances, e.g. allowing for the sensitive detection of protein binding.

Available for external use

Associated technology

Surface Charaterisation, Surface Plasmon Resonance


Pieter De Beule Contact with Pieter De Beule