Equipment

Four-Probe Resistivity Mapper

18_-_4_point_probe_equipment Ampliar

Description

A four-probe tester, automatic system to measure Sheet Resistance and Resistivity of wafers, up to 200mm in diameter. The tool contains data analysis functions such as: Data Map, 3D Contour Maps, Diameter Scan, Trend Analysis, etc. Measurements range from 1mΩ/sq to 2MOhm/sq, resistivity between 10μΩ.cm to 200 kΩ.cm and the electronic accuracy remains in 0.5% for V/I.

Available for external use

Associated technology

Location

Cleanroom

Contact.

Adelaide Miranda Contact with Adelaide Miranda