Equipment

Semi automatic Probe Station

20_-_semi_automatic_probe_station_equipment Ampliar

Description

A semi-automatic wafer probe station used to automatically gather electrical characterisation data of devices at wafer level. This tool is useful to extract statistically meaningful data concerning key device parameters and microfabrication process dependent deviations.

Features and benefits :
• Precise 200mm probe system, with pre-programmed test sequences.
• Sub-micron probing capability.
• Die-to-die stepping time of under 100ms.
• Able to probe up to 20 die/sec.

Associated technology

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