Equipment

High-resolution SEM Metrology

Hr_sem_metrology_s_equipment Ampliar

Description

The NovaNanoSEM 650 is a key characterization system for the analysis of nanoscale materials and structures, being capable of handling multiple sample/wafer sizes up to 8inch. This instrument uses a cold field emission electron source and can achieve an ultimate resolution of 1.0 nm at 15 kV and 2.0 nm at 1 kV. It has two secondary electron detectors with accelerating voltages from 0.5 – 30 kV. Operation and image-display are computer-controlled with image-processing software also included. The vacuum system includes 3 sets of ion pumps on the electron beam column and a turbomolecular pump on the sample chamber. The NovaNano SEM is fully integrated with an automation software to enable the full automation of the scanning electron microscope for metrology recipe creation, image and edge recognition, scanning and stage movements.

Available for external use

Associated technology

Location

Cleanroom

Contact.

Margaret Costa Contact with Margaret Costa