Probe Corrected HRTEM

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Titan 200 kV ChemiStem (FEI), with Probe Cs corrector - Titan ChemiSTEM is the state-of-the-art, 80-200 kV FEG Scanning Transmission Electron Microscope of the Titan G2 family with TEM, STEM, EFTEM and EELS modes.
Cs DCOR Probe Corrector 200 kV: Cs probe corrector, using dodecapole elements allowing for aberration correction up to the 4th order and optimization of the 5th order.
BF and DF images can be acquired simultaneously together with the HAADF image. The BF/DF on-axis detector consists of three solid-state detectors; 1x bright field (BF) and 2x dark field (DF2 and DF4).
Super-X EDX System: The integration of four windowless Silicon Drift Detector (SDD) symmetrically placed around the sample offering 0.7 srad collection angle and 120 mm2 detector size provides the ideal EDX detector for use with FEI’s DCOR probe corrector. The collection time for STEM/EDX elemental maps in fast mapping mode is decreased significantly and the detection sensitivity for light elements as well as low concentrations is greatly enhanced, thus providing superior sensitivity and unrivaled speed in EDX analysis and fast EDX mapping.
EELS/EFTEM: Gatan Energy Filter, Quantum and the EFTEM EELS module included.
Electron tomography: Special tomography sample holder, software for the acquisition of Tomography data in TEM and STEM, software for alignment and reconstruction and visualization.
The main optical specifications in S/TEM for the Titan ChemiSTEM at 200 kV
- STEM 0.08 nm
- TEM point resolution 0.24 nm
- TEM Information limit 0.11 nm

Available for external use