Equipment

Wet Benches and Fume Hoods

06_-_wet_benches_equipment Ampliar

Description

Wet Benches are stations for wet etching and cleaning of wafers and devices. The various wet benches differ in the specific process modules available and the materials allowed at each station. INL is equipped with Wet benches for post lithography steps such as resist stripping, lift-off, metal and oxide etching.

Associated technology

Location

Cleanroom

Contact.