Project Title: INTEGRATION -  Integrated Hybrid Microsystems and Nanodevices

The overall goal of this project is the development of a modular set of state-of-the-art nano-devices for integration with multi-project CMOS wafers aiming the development of complex cross-technology platforms which are expected to enable a set of applications that unavailable in a single technology.

To this end, INL will develop a set of building blocks based in three different, but complementary, technologies: Spintronics, Microelectromechanical Systems (MEMS) and Semiconductor Thin Film Technologies. Each of these technologies will be used to produce state-of-the-art devices targeting applications natural to each of the fields. Such devices will be then be integrated in a modular fashion into more sophisticated and multi-functional platforms as well as in hybrid devices which combine at least two different pieces of technology

Furthermore, an integration process of all the devices developed (both single technology devices and hybrids) with standard multi-project CMOS wafers will be developed. This integration includes the development of a back end process aiming the interconnection/growth/microfabrication of the devices produced on common CMOS multi-project wafers and the creation of a package that includes design rules and models of the devices manufactured to be used by circuit designers.

With this project, INL be able to incorporate a large number of devices into CMOS as a means to construct complex multifunctional platforms. The integration of nano-devices on CMOS multiproject wafers will be demonstrated in a set of devices which include hybrid Spintronics-CMOS oscillators, MRAM based FPGA’s, footprint optimized MEMS accelerometers integrating spintronic devices, large scale integration of sensor arrays (pressure, temperature, humidity, stress, magnetic, etc…) in micromachined CMOS platforms and micro energy harvesting circuits.


Project financed by: ON2 - O Novo Norte – The north regional operational programme

Priority Axis I – Competitiveness, Innovation and Knowledge.

Call: SAESCTN-PIIC&DT/1/2011 

Total budget: 772K€

Financing: 664K€