Cleanroom
The INL Cleanroom has 7 bays. It comprises approximately 450 m2 of Class 1000 and 150 m2 of Class 100. The INL Cleanroom offers Micro-and Nanofabrication solutions for 200 mm wafers down to small-sized sample pieces.
Facilities
The labs
Cleanroom Bay 7-Nanolithography
Nanolitography Bay 1 of the cleanroom facility houses the Vistec 5200 ES electron beam lithography
