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More about Joao Gaspar

Joao Gaspar

Staff Researcher


João Gaspar received the Licenciatura degree in Technological Physics Engineering from the Instituto Superior Técnico (IST), Technical University of Lisbon, Portugal, in 2000, and the Ph.D. degree in Materials Engineering from the Instituto de Engenharia de Sistemas e Computadores Microsistemas e Nanotecnologias (INESC MN), Lisbon, and IST, in 2004, focusing on the fabrication and characterization of thin-film silicon microelectromechanical systems, namely thermal and electrostatic actuators and high-frequency, high-Q microresonators, implementation of optical setups for monitoring vibration of microstructures and integration of detection schemes of their movement using piezoresistive and magnetoresistive transduction.
He then joined the Microsystems Materials Laboratory (MML), Department of Microsystems Engineering (IMTEK) of the University of Freiburg, Germany, at the end of 2004 as a Post-Doctoral Fellow for a 2 year period working on the modeling and characterization of multilayer membranes and development of automated wafer-scale micromechanical characterization techniques, namely the bulge and microtensile tests.
In Dec. 2006, he was promoted to Lecturer and Group Leader of the IMTEK Microsystems Materials Laboratory, position he held until joining INL in the beginning of 2011. His research activities included the development of microfabrication processes and advanced silicon micromachining, high-throughput wafer-scale testing and reliability of MEMS materials and devices, resonance and optical applications, electret-based 2D resonant micro energy scavengers, and microneedles and capillary arrays for intracellular recording applications plus related post-CMOS processing.
Now at INL, João Gaspar and his team continue involved in microsystems topics (MEMS sensors/actuators, flexible substrate applications, optical and RF engineering, micro energy harvesting, microfluidics and device reliability), support the cleanroom through equipment maintenance, tuning of process parameters and implementation of MEMS multi-project wafer (MPW) runs, and provide the various groups of INL with MEMS platforms.

Selected Publications

• P. Alpuim, J. Gaspar, P. Gieschke, C. Ehling, J. Kistner, N. J. Goncalves, M. I. Vasilevskiy, and O. Paul, “Study of the piezoresistivity of doped nanocrystaline silicon thin films”, J. Appl. Phys., vol. 109, 123717, 2011.
• S. Kamiya, Y. Ikeda, J. Gaspar, and O. Paul “Effect of humidity and temperature on the fatigue behavior of polysilicon films,” Sens. Actuators A: Phys., vol. 170, no. 1-2, pp. 187-195, 2011.
• G. Pedrini, J. Gaspar, M. E. Schmidt, I. Alekseenko, O. Paul, and W. Osten, “Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry,” Opt. Eng., vol. 50, no. 10, 101504, 2011.
• J. Gaspar, O. Paul, V. Chu, and J. P. Conde “Mechanical properties of low-temperature silicon films,” J. Micromech. Microeng., vol. 20, no. 3, 035022 (6pp), 2010.
• U. Bartsch, J. Gaspar, and O. Paul, “Low-frequency two-dimensional resonators for vibration micro energy harvesting, J. Micromech. Microeng., vol. 20, no. 3, 035016 (12pp), 2010.