MEMS-actuators-on-scanning-electron-microscope

Micro and nanofabrication

RESEARCH

DEPARTMENTS
Nanoeng
Lifescience
QuantMat
Nanophotonics
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Microand

DESCRIPTION

micronanofabThe next technological revolution is approaching and integrating into our daily lives at a very fast pace; a pace which is controlled by how big data are collected within the Internet of Things’ (IoT) platforms, interpreted by apps and software, and communicated by objects within our surroundings, which can be as close as our skin and as far as other planets.  At the root of how all these data are sensed, transmitted, decoded, and stored, lies the fabrication of hardware for all of these.  At INL, the department of Micro and Nanofabrication aims at developing materials, processes, and tools to gear interdisciplinary technology towards smarter, faster, and more affordable hardware, or devices, which will enable society to improve our current way in which materials, human senses, and “things” are used and interpreted.

The long-term vision for this department is to build upon our existing portfolio for the next-generation of highly-integrated smart systems. Based on identified needs from both internal and external partners, three new research lines are now being launched within this department: Exploratory Lithography, Haptics and Tactile Interfaces, and Novel Packaging Techniques.

RESEARCH GROUPS

catalysisDedicated to bottom-up catalysis, synthesis and research of materials – catalytic, adsorption, thermoelectric and electronic, applications such as electrodes for water electrolysis, novel magnetic nanoparticles for biomedical area, more efficient thermoelectrics for cooling, effective water treatment and monitoring technologies and inexpensive photovoltaic (PV) modules for clean energy, to name a few.

View Nanochemistry Group

MEMS-actuators-on-scanning-electron-microscopeThe Microfabrication and Exploratory Nanotechnology (MeN) group is dedicated to fabrication processes for internal and external users in the areas of: MEMS and NEMS, spintronics, microfluidics, graphene and thin film semiconductors, energy storage, conversion and optical devices, lithography and advanced packaging; also, acting as a facility and expertise group providing support for all cleanroom users, multi project wafer runs (MEMS, spintronics, polyimide, …), rapid prototyping and integration..

View Microfabrication and Exploratory Nanotechnology Group

Working on top-down nanofabrication and characterization of optoelectronic materials and devices in rigid and flexible substrates, and incorporation of nanotechnology into thin film solar cells (ultrathin architectures and materials) for increased efficiency.

View Nanofabrication for Optoelectronic Applications group

DESCRIPTION

micronanofabThe next technological revolution is approaching and integrating into our daily lives at a very fast pace; a pace which is controlled by how big data are collected within the Internet of Things’ (IoT) platforms, interpreted by apps and software, and communicated by objects within our surroundings, which can be as close as our skin and as far as other planets.  At the root of how all these data are sensed, transmitted, decoded, and stored, lies the fabrication of hardware for all of these.  At INL, the department of Micro and Nanofabrication aims at developing materials, processes, and tools to gear interdisciplinary technology towards smarter, faster, and more affordable hardware, or devices, which will enable society to improve our current way in which materials, human senses, and “things” are used and interpreted.

The INL department of Micro and Nanofabrication runs INL’s 1000 m2 cleanroom facility with more than 50 systems, offering micro- and nanofabrication solutions on substrates from 200 mm- diameter wafers down to samples below 10 mm in size. Our offer includes a variety of interdisciplinary technologies such as advanced Si micromachining, MEMS and NEMS, processes for spintronics, sensors and hybrid devices, microfluidics, techniques involving graphene, carbon nanotubes (CNTs) and 2D electronics, thin-film silicon electronics, nanostructuring methods for solar cells and other devices, fabrication of flexible substrate systems, laser micro-structuring, and interconnects and advanced packaging (incl. plasma dicing). Advanced metrology and wafer scale device testing are also available. The cleanroom provides open access to internal and external users with considerable flexibility, as well as custom-made, hands-off process and product development and fabrication, some of which are performed in multi-project wafer (MPW) formats.

A considerable effort is also put in users’ training through doctoral programs, summer internships, exchange programs, and RTD agreements with industry. During 2016, the department staff has increased to a group of 12 highly qualified scientists and engineers providing support throughout all development chain (modeling and design, process integration and device fabrication, packaging and testing), a total of 80 registered users have had access to its equipment, 12 contract services have been or are currently being executed and ca. 900 silicon wafers have been processed, with an average equipment load reaching 50%. Its staff is expected to still increase to a number of 16 during 2017 as a result of newly approved, funded projects.

The long-term vision for this department is to build upon our existing portfolio for the next-generation of highly-integrated smart systems. Based on identified needs from both internal and external partners, three new research lines are now being launched within this department: Exploratory Lithography, Haptics and Tactile Interfaces, and Novel Packaging Techniques.

RESEARCH GROUPS

catalysisDedicated to bottom-up catalysis, synthesis and research of materials – catalytic, adsorption, thermoelectric and electronic, applications such as electrodes for water electrolysis, novel magnetic nanoparticles for biomedical area, more efficient thermoelectrics for cooling, effective water treatment and monitoring technologies and inexpensive photovoltaic (PV) modules for clean energy, to name a few.

View Nanochemistry Group

MEMS-actuators-on-scanning-electron-microscopeThe Microfabrication and Exploratory Nanotechnology (MeN) group is dedicated to fabrication processes for internal and external users in the areas of: MEMS and NEMS, spintronics, microfluidics, graphene and thin film semiconductors, energy storage, conversion and optical devices, lithography and advanced packaging; also, acting as a facility and expertise group providing support for all cleanroom users, multi project wafer runs (MEMS, spintronics, polyimide, …), rapid prototyping and integration..

View Microfabrication and Exploratory Nanotechnology Group

Working on top-down nanofabrication and characterization of optoelectronic materials and devices in rigid and flexible substrates, and incorporation of nanotechnology into thin film solar cells (ultrathin architectures and materials) for increased efficiency.

View Nanofabrication for Optoelectronic Applications group

RESEARCH

DEPARTMENTS
Nanoeng
Lifescience
QuantMat
Nanophotonics
aemicros.png
Microand