Nanoelectronics Microelectromechanical Systems (MEMS) and Micro Energy Harvesting Devices

The group of MEMS and Micro Energy Harvesting Devices of INL works on the development of microsystems such as MEMS sensors and actuators, flexible substrate applications, optical and RF engineering, micro energy harvesting, microfluidics and device reliability, supports the cleanroom through equipment maintenance, tuning of process parameters and implementation of MEMS multi-project wafer (MPW) runs for 200 mm substrates, and provides the various nano- and bio-technology groups of INL with MEMS platforms. 


Group manager Joao Gaspar