Selected Publications

• Flexible Pressure and Temperature Microsensors for Textile-Integrated Wearables
  ACTUATORS, 2024

• Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer
  JOURNAL OF MANUFACTURING PROCESSES, 2024

• Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
  MICRO AND NANO ENGINEERING, 2023

• ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY
  Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, 2022

• Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020