Integrated Micro and Nano Technologies (IMiNa)
IMiNa develops applied research in silicon-based micro/nano-electromechanical systems (MEMS/NEMS), flexible and printed sensors, gas and passive sensors, micro-optoelectromechanical systems (MOEMS), diffractive optics, and microlenses. The group also works on advanced integration technologies, such as microfabrication process integration, microfluidics integration, and packaging. The group’s large, funded project portfolio relies on a strong collaboration with industrial partners, reaching high TRLs of the developed micro and nano technologies, as well as significant activity regarding industry commissioned research in the MEMS area.
Research lines:
- MEMS and flexible devices
- Micro optical elements
- Advanced integration technologies
Projects
Publications
-
A strong dependence of sputtering power on c‐axis oriented aluminium nitride on Si (111): A structural and electrical study
IET Nanodielectrics, 2024Flexible Pressure and Temperature Microsensors for Textile-Integrated Wearables
ACTUATORS, 2024Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer
JOURNAL OF MANUFACTURING PROCESSES, 2024Geometry-Optimized Flexible Ferroelectret Fabricated by Laser Patterning of an Adhesive Spacer
IEEE SENSORS JOURNAL, 2024pyMOE: Mask design and modeling for micro optical elements and flat optics ☆
Computer Physics Communications, 2024Fabrication and sensing properties of a molecularly imprinted polymer on photonic PDMS substrate for the optical detection of C-reactive protein
Chemical Engineering Journal, Volume 485, 2024, 149924. , 2024 -
Numerical simulation, fabrication, and characterization of a heating system for integration into an Organ-on-a-Chip
SENSORS AND ACTUATORS A-PHYSICAL, 2023Development of Smart Clothing to Prevent Pressure Injuries in Bedridden Persons and/or with Severely Impaired Mobility: 4NoPressure Research Protocol
Healthcare, 2023A Numerical Study of the Heat Distribution Generated by a Microheater in an Organ-on-a-Chip Chamber
2023 IEEE 7TH PORTUGUESE MEETING ON BIOENGINEERING, ENBENG, 2023Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
MICRO AND NANO ENGINEERING, 2023Cu(In,Ga)Se-2 based ultrathin solar cells the pathway from lab rigid to large scale flexible technology
NPJ FLEXIBLE ELECTRONICS, 2023Development of Thin-Film-Based Sensors for Smart Weldability Estimation of Industrial Solder Tips
IEEE SENSORS JOURNAL, 2023High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2023Light-Controlled Pyroelectric Effect: Direct Conversion of Light-Induced Heat to Physical Actuation
R. M. R. Pinto, M. Faraji and K. B. Vinayakumar, "Light-Controlled Pyroelectric Effect: Direct Conversion of Light-Induced Heat to Physical Actuation," Transducers, Kyoto, Japan, 2023, pp. 1260-1263, 2023Material jetting of carbon nano onions for printed electronics
NANOTECHNOLOGY, 2023Pyroelectrically Polarity Switched Electret for Flexible Invisible Digital Memory and Self-Powered Sensors
IEEE SENSORS JOURNAL, 2023Self-Powered Flexible Piezoelectret Array for Wearable Applications
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023Textile-Based Stretchable Strain Sensor for Human Activity and Health Monitoring
R. M. R. Pinto, M. Faraji and K. B. Vinayakumar, "Textile-Based Stretchable Strain Sensor for Human Activity and Health Monitoring,", Transducers, Kyoto, Japan, 2023, pp. 1612-1615., 2023Three-level hierarchical micro_nanostructures on biopolymers by injection moulding using low-cost polymeric inlays
The International Journal of Advanced Manufacturing Technology volume 124, pages1527–1535 (2023), 2023Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2023End-users assessment of an innovative clothing-based sensor developed for pressure injury prevention: a mixed-method study
International Journal of Environmental Research and Public Health, 2023Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds
MICRO AND NANO ENGINEERING, 2023Levofloxacin‐Loaded Microneedles Produced Using 3D‐Printed Molds for Klebsiella Pneumoniae Biofilm Control
Advanced Therapeutics, 2023 -
Design of Arbitrary Magnetic Patterns on Magnetic Polymer Composite Objects: A Finite Element Modelling Tool
POLYMERS, 2022Developing a structural-based local learning rule for classification tasks using ionic liquid space-based reservoir
NEURAL COMPUTING & APPLICATIONS, 2022Heat and Temperature Localization via Fabry-Perot Resonances at the Tip of a Nanofocusing Cone
ADVANCED OPTICAL MATERIALS, 2022Lead free 0.9Na 1/2 Bi 1/2 TiO 3 –0.1BaZr 0.2 Ti 0.8 O 3 thin film with large piezoelectric electrostrain
APPLIED PHYSICS LETTERS, 2022Antireflective and superamphiphilic coatings on polycarbonate
OPTICAL MATERIALS, 2022Tactile and visual perception of plastic textures for car interiors: Psychophysical and affective dimensions
International Journal of Industrial Ergonomics, vol. 92, p. 103369, Nov. 2022, 2022Ultra-thick films using single spin coated commercial photoresist: Challenges and solutions
2022 IEEE 9TH ELECTRONICS SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE, ESTC, 2022A comparative study of the effect of different surface treatments on polymeric substrates
VACUUM, 2022Miniaturized prototype for gravity field assessment using distributed earth-orbiting assets
CNES-ESA 4S Symposium, 2022Pyroelectrically-Charged Piezoelectrets for Force Sensing
IEEE Transactions on Dielectrics and Electrical Insulation, vol. 29, no. 3, pp. 845-852, June 2022, 2022Anti-reflective coatings for polymer substrates
Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper FB.15., 2022Flexible ferroelectret for zero power wearable application
2022 IEEE INTERNATIONAL CONFERENCE ON FLEXIBLE AND PRINTABLE SENSORS AND SYSTEMS (IEEE FLEPS 2022), 2022Inkjet-Printing of Carbon Nano Onions for Sensor Applications in Flexible Printed Electronics
2022 IEEE INTERNATIONAL CONFERENCE ON FLEXIBLE AND PRINTABLE SENSORS AND SYSTEMS (IEEE FLEPS 2022), 2022Photocurrent Enhancement with Arrays of Silicon Light Nanotowers for Photovoltaic Applications
ACS APPLIED NANO MATERIALS, 2022ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, 2022Injection molding of high-precision optical lenses: A review
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2022Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
MICROELECTRONIC ENGINEERING, 2022Preliminary Assessment of Combined Stimuli with Laterally Modulated Midair Ultrasound Focus
2022 International Symposium on Electrical, Electronics and Information Engineering (ISEEIE), 2022PYROELECTRICALLY-CHARGED FLEXIBLE PIEZOELECTRET SENSORS: ROUTE TOWARDS SUSTAINABLE FUNCTIONAL ELECTRONICS
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 2022Pyroelectrically Polarity Switched Electret for Flexible Invisible Digital Memory and Self-Powered S
IEEE SENSORS JOURNAL, 2022CMOS-Integrated Aluminum Nitride MEMS: A Review
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022Pyroelectrically Charged Flexible Ferroelectret-Based Tactile Sensor for Surface Texture Detection
ELECTRONICS, 2022Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
MICRO AND NANO ENGINEERING, 2022High-Frequency Light Rectification by Nanoscale Plasmonic Conical Antenna in Point-Contact-Insulator-Metal Architecture
ADVANCED ENERGY MATERIALS, 2022Importância da Simulação do processo na integração de filmes funcionais e decorativos em componentes para indústria automóvel
Revista Molde CEFAMOL, 2022 -
Foldable layered connection, and method for manufacturing a foldable layered connection
US Patent Office, 2021High precision, geometry independent analytical method for self-inductance calculation in planar coils
IEEE International Conference on Industrial Technology (ICIT 2021), 2021Plasmomechanical Systems: Principles and Applications
Advanced Functional Materials, 2021PYROELECTRICALLY RECHARGEABLE ELECTRET FOR CONTINUOUS VIBRATION ENERGY HARVESTER
2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021Silane-based coating charged with TiO2 NPs for dental implant applications
SURFACE & COATINGS TECHNOLOGY, 2021Broadband and Omnidirectional Antireflection Surfaces Based on Deep Subwavelength Features for Harvesting of the Solar Energy
SOLAR RRL, 2021CHARMIE: A Collaborative Healthcare and Home Service and Assistant Robot for Elderly Care
APPLIED SCIENCES-BASEL, 2021Enhanced virtual reality application with tactile feedback for prototyping in-car dashboard surfaces
2021 IEEE WORLD HAPTICS CONFERENCE (WHC), 2021 -
Industry 4.0: Real-time monitoring of an injection molding tool for smart predictive maintenance
2020 25TH IEEE INTERNATIONAL CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION (ETFA), 2020Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020Organ-on-a-Chip: A Preclinical Microfluidic Platform for the Progress of Nanomedicine
SMALL, 2020
