Inês Garcia
Application & Systems Integration Engineer

Inês S. Garcia received the Ph.D. degree in electronics and computer engineering from the University of Minho, Guimarães, Portugal, in 2024. She is a MicroElectroMechanical Systems (MEMS) Research Engineer with the Integrated Micro and Nanotechnologies at INL. Her expertise is focused on the design, fabrication, and characterisation of MOEMS and MEMS devices.
Her research interests range from inertial sensors ( e.g., acceleration and shock sensing based on pull-in transduction) to optical scanning and splitting devices. She has extensive experience in SOI-based microfabrication, taking advantage of different lithography techniques, such as grayscale to nanoimprint, to create self-aligned multilevel MEMS structures.
Selected Publications
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Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer
JOURNAL OF MANUFACTURING PROCESSES, 2024 -
Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
MICRO AND NANO ENGINEERING, 2023 -
ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, 2022 -
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020