Home Team Inês Garcia Inês Garcia Research Engineer Integrated Micro and Nanotechnologies Selected Publications 2022 ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY2022Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography2022 2020 Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography2020 2019 Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction2019