Inês Garcia

Research Engineer

Integrated Micro and Nanotechnologies

Selected Publications

ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY
2022
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
2022
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
2020
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019

Get to know other members of the INL community