Inês Garcia

Application & Systems Integration Engineer

Hanay Research Group

Inês S. Garcia received the Ph.D. degree in electronics and computer engineering from the University of Minho, Guimarães, Portugal, in 2024. She is a MicroElectroMechanical Systems (MEMS) Research Engineer with the Integrated Micro and Nanotechnologies at INL. Her expertise is focused on the design, fabrication, and characterisation of MOEMS and MEMS devices.

Her research interests range from inertial sensors ( e.g., acceleration and shock sensing based on pull-in transduction) to optical scanning and splitting devices. She has extensive experience in SOI-based microfabrication, taking advantage of different lithography techniques, such as grayscale to nanoimprint, to create self-aligned multilevel MEMS structures.

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Selected Publications

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