Inês Garcia
PhD Student
Selected Publications
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ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRY
Hilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, 2022 -
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
MICRO AND NANO ENGINEERING, 2022 -
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020 -
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019