Rosana Dias
Staff Researcher
Rosana Dias is a Staff Researcher in the Integrated Micro and Nanotechnologies research group at INL. She obtained her PhD in the MEMS area, focusing on pull-in time accelerometers and gas viscosity sensing at the University of Minho, the Delft University of Technology and the University of British Columbia. Before joining INL she was a postdoc researcher responsible for the development of a MEMS magnetometer for space applications, within a European Space Agency funded project.
Her expertise concerns the development of sensors and actuators to address technical challenges faced by society and industry. She has large experience in modelling, design, fabrication and testing of MEMS devices. Her research interests range from mechanical sensors and actuators (eg. acceleration and magnetic field sensing – MEMS and hybrid spintronic MEMS; large displacement actuators, micromirrors) to energy harvesting devices (piezoelectric AlN and EMF-based induction) and flexible substrate-based applications (flexible pressure and temperature sensors, resonators and packaging).
Selected Publications
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CMOS-Integrated Aluminum Nitride MEMS: A Review
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022 -
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020 -
Highly sensitive MEMS frequency modulated accelerometer with small footprint
Sensors and Actuators A: Physical , 2020 -
DESIGN OPTIMIZATION OF A LORENTZ FORCE, AMPLITUDE MODULATED, MEMS SPACE MAGNETOMETER
2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020 -
Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019