Selected Publications

• 2022

  CMOS-Integrated Aluminum Nitride MEMS: A Review
  2022

• 2020

  Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
  2020

  Highly sensitive MEMS frequency modulated accelerometer with small footprint
  2020

  DESIGN OPTIMIZATION OF A LORENTZ FORCE, AMPLITUDE MODULATED, MEMS SPACE MAGNETOMETER
  2020

• 2019

  Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates
  2019