Home Team Rosana Dias Rosana Dias Staff Researcher Integrated Micro and Nanotechnologies Selected Publications 2022 CMOS-Integrated Aluminum Nitride MEMS: A Review2022 2020 Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography2020Highly sensitive MEMS frequency modulated accelerometer with small footprint2020DESIGN OPTIMIZATION OF A LORENTZ FORCE, AMPLITUDE MODULATED, MEMS SPACE MAGNETOMETER2020 2019 Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates2019