INL facilities open to external users

November 9, 2012

The International Iberian Nanotechnology Laboratory provides 22,000 m2 of laboratory space and state-of-the-art equipment for various research areas. INL scientific facilities are fully operational since the beginning of 2011 and cleanroom processes and laboratory equipment are now available for external users.

The cleanroom provides class 100 and class 1000 laboratory space dedicated to nanolithography, photolithography, wet process, planarization, reactive Ion etching, deposition, and analytical instrumentation for process and device characterization. A separate biology bay completes cleanroom key capabilities.

The central Biology and Biochemistry facility provides support for groups developing research in these areas, including specific facilities for molecular biology, microbiology, bio-imaging facility.

The high accuracy laboratories offer a detailed structural characterization of thin films, interfaces, nanostructures, and biological structures. Available techniques include atomic force microscopy, surface analysis by XPS, electron microscopy including a probe corrected TEM, FIB and environmental SEM.

Other support labs provide state-of-the-art equipment for optical imaging, spectral ellipsometry, magnetometry, radiofrequency device characterization, MEMS, and nanochemistry/spectroscopy.

External users can check equipment and process availability at INL website, as well as the contact person for the particular item. Conditions of use are as follows:

1 -external users coming to INL within approved collaborative projects (FCT, CSIC, European union, companies, university/research center-INL protocols, others)

– Users will get temporary user status at INL and will perform/participate in the measurements, processes, research specified in the project always in collaboration with the project representative at INL. INL costs will be internally charged to the research project.

2 -external users requesting particular work/service or equipment use outside any collaborative framework

– Users must supply a brief description (maximum one page) of the work/service required and send it to the proper equipment/process contact person

– if work/service is approved, the work/service invoice will be prepared, and the respective work/service order needs to be received at INL prior to work execution

-after work/service completion, INL will invoice the ordering entity for the work done.

The equipment was cofinanced the under the Portuguese North Regional Program “ON.2 – O Novo Norte”, Operations Norte-07-0162-FEDER-000002 and NORTE-07-FEDER-000045.


Equipment Overview

High Accuracy Laboratories

X-ray thin films/reflectometry

Small angle X-ray scattering (SAXS)

Atomic force microscope – materials

Atomic force microscope – bioscience

Probe corrected HRTEM

Environmental FEG-SEM


X-ray photoelectron spectroscopy


Service enquires (including mask fabrication) paulo.freitas(at)

E-beam lithography

High resolution metrology

Direct write laser lithography

Mask aligner

Photoresist tracks

CNT deposition tool (PEV, 800C)

Chemical mechanical Polishing and Planarization Tool

Cu Electroplating

KOH/TMOH Si wet etch

Multitarget sputtering tool (200 mm)

Multitarget confocal sputtering tool

Metallization sputtering tool (Al, TiWN, Al2O3)

Plasma asher

Broad beam ion milling with SIMS end point detection

PECVD oxides, oxynitrides, and a-Si:H

Oxide reactive ion etch

Al (TiW) reactive ion etching

Si deep reactive ion etching

Oxide vapour etch Ion release system

XF2 isotropic Si etch

Contact profilometer

Resistivity mapper – four probe

Optical profilometer/ellipsometer

Micro spotter

Contact angle measurement

Packaging Laboratory

Dicing saw

Wire Bonders/pick and place

Optical Imaging, Spectral ellipsometry, others

Life science confocal microscope

Multifunctional Inv. microscope for life sciences

Spectral imaging ellipsometry

Raman confocal microscopy

Magnetometry, RF and MEMS laboratories

SQUID magnetometry

Vibrating sample magnetometry

Magnetic annealer (=-2T, 0-400C)

CIPT tester (in plane and out of plane field)

Laser scanning vibrometer

MEMS wafer prober

Climate chamber

Hyperthermia equipment

Electronic Support

Service enquires (IC design, PCB layout, etc…) joao.piteira(at)

Central BioLab

Micro volume Fluorospectrometer

Micro Volume Spectrometer

Microfluidics Electrophoresis

Thermocycler (PCR)

Real Time PCR

Gel Imaging (fluorescence and chemiluminescence)

Fluorescence spectrometer

Microplate Reader

Nanochemistry/Spectroscopy Laboratories

UV-vis Spectrophotometer

Automated gas sorption analyser/pore size-surface area

Thermogravimetry and differential Scanning Calorimetry

Gas analyser system/Mass Spectrometer

Gas Chromatography

Dynamic Light Scattering (DLS) and Zeta Potential (ZP) measurement system

CHNS/O Elemental Analyser

Optical Emission Spectrometer (ICP-OES)

Fluorescence life time Spectroscopy

Atomic Layer Deposition (ALD) System

Electro Spinning/Spray System

Solar Illumination – IV solar cell test

Quantum efficiency measurement system (QEX10)

Controlled intensity Modulated Photocurrent/Photovoltage Spectrometer (CIMPS)

J-815 Circular Dichroism Spectrometer