Plasma-Therm Technical Workshop at INL – Braga

March 1, 2023

INL – International Iberian Nanotechnology Laboratory together with PhotonExport and in collaboration with Plasma-Therm announce an upcoming Plasma Technical Workshop to be held on Wednesday, 8 March 2023. The event will take place between 9h00 and 18h30 at INL – International Iberian Nanotechnology Laboratory in Braga, Portugal will focus on the fundamentals of plasma etching and deposition.

The workshop will cover topics such as the basics of plasma reactors and mechanisms for etching and deposition and review state-of-the-art etching and deposition technologies as applied to semiconductors, MEMS, and nanofabrication. Talks will cover compound semiconductor, dielectric, and deep silicon etching as well as PECVD and high-density plasma CVD of silicon-based materials. Fundamental and new ideas for endpoint detection and sample thermal budget management will also be presented.

The event will be presented by, David Lishan, PhD who has extensive experience in the field of plasma processing, having worked on a range of material, semiconductor, and chemistry R&D projects. With over 60 publications and conference presentations, David has recently organized and presented plasma processing workshops at leading institutions worldwide.

This workshop is an opportunity for professionals in the field of plasma processing to learn, network and enhance their knowledge and understanding of the latest technologies and techniques. INL – International Iberian Nanotechnology Laboratory, PhotonExport and Plasma-Therm are committed to advancing the field of plasma processing and look forward to hosting a successful event.

The workshop is free, but pre-registration by 6 March 2023.