
Hanay Group
The Hanay Group develops applied research in silicon-based micro/nano-electromechanical systems (MEMS/NEMS), flexible and printed sensors, gas and passive sensors, micro-optoelectromechanical systems (MOEMS), diffractive optics, and microlenses. The group also works on advanced integration technologies, such as microfabrication process integration, microfluidics integration, and packaging. The group’s large, funded project portfolio relies on a strong collaboration with industrial partners, reaching high TRLs of the developed micro and nano technologies, as well as significant activity regarding industry commissioned research in the MEMS area.
Research lines:
- MEMS and flexible devices
- Micro optical elements
- Advanced integration technologies
Projects
Publications
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Flexible Pressure and Temperature Microsensors for Textile-Integrated Wearables
ACTUATORS, 2024Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer
JOURNAL OF MANUFACTURING PROCESSES, 2024 -
Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2020 -
Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 -
Embedded platform for generic high-order sigma-delta accelerometers testing
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016Performance comparison of sigma-delta modulator architectures for MEMS accelerometers using a fully-digital approach
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control
SENSORS AND ACTUATORS A-PHYSICAL, 2016 -
Strain engineering of CoSA-N-C catalyst toward enhancing the oxygen reduction reaction activity
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2009